ID2PPAC (101007254)

  https://cordis.europa.eu/project/id/101007254

  Horizon 2020 (2014-2020)

  Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements

  ECSEL-IA (ECSEL-2020-1-IA)

  microelectronics

  2021-06-01 Start Date (YY-MM-DD)

  2024-05-31 End Date (YY-MM-DD)

  € 107,340,233 Total Cost


  Description

In the ID2PPAC project the technology solutions for the 2nm node identified in the preceding project IT2 will be consolidated and integrated with the objective to demonstrate that Performance Power Area and Cost (PPAC) requirements for this generation of leading edge logic technology can be achieved. To continue the Moore’s law trajectory to the 2nm node, while meeting PPAC requirements, the combination of further advancements in EUV lithography & masks, 3D device structures, materials and metrology is required. The strength of the project pivots on the focused engagement of leading expert partners in these key interlocking areas and a shared pilot line. The ID2PPAC project, is expected to enable IC-fabs to do EUV-based, single-print, High Volume Manufacturing for the 2nm node by 2025. This technology evolution is driven by the growing demand for compute power which increases more than exponentially with time and has made the world migrate from 1 billion interconnected devices in the “PC era” to 10 billion in the “Mobile + cloud era” to the future “Intelligence era” in which there will be over 100 billion intelligent connected devices. To enable this growth, the semiconductor industry is continuously pursuing technology innovations to realize this progress as has been predicted by Moore’s Law and will continue to do so. The project will also help to expand Europe's technological capacity to act in this field, which is crucial for digitization, (edge) AI and for solving national, European and global societal challenges and will strengthen the consortium of leading European companies and institutes active in this sector.


  Complicit Organisations

5 Israeli organisations participate in ID2PPAC.

Country Organisation (ID) VAT Number Role Activity Type Total Cost EC Contribution Net EC Contribution
Belgium ICOS VISION SYSTEMS NV (953141692) BE0431049588 participant PRC € 1,843,750 € 368,750 € 368,750
Netherlands VDL ETG TECHNOLOGY & DEVELOPMENT BV (911969751) NL001327045B01 participant PRC € 2,032,035 € 406,407 € 406,407
France COVENTOR SARL (999478107) FR40431906833 participant PRC € 1,433,781 € 286,756 € 286,756
Netherlands ASML NETHERLANDS B.V. (999943416) nan coordinator PRC € 13,072,000 € 2,614,400 € 2,614,400
Austria EV GROUP E. THALLNER GMBH (999611676) ATU64462824 participant PRC € 1,471,425 € 294,285 € 294,285
France RECIF TECHNOLOGIES (989695851) FR09483341590 participant PRC € 1,307,945 € 326,986 € 326,986
Netherlands NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO (999988909) NL002875718B01 participant REC € 1,862,716 € 651,950 € 651,950
Germany PVA TEPLA ANALYTICAL SYSTEMS GMBH (987078015) DE111767657 participant PRC € 3,000,000 € 600,000 € 600,000
Spain FUNDACIO INSTITUT DE CIENCIES FOTONIQUES (999619436) ESG62819537 participant REC € 189,500 € 66,325 € 66,325
Germany FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV (999984059) DE129515865 participant REC € 805,823 € 282,038 € 282,038
Israel APPLIED MATERIALS ISRAEL LTD (985728454) IL511166373 participant PRC € 2,768,750 € 553,750 € 553,750
Belgium INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM (999981149) BE0425260668 participant REC € 14,549,501 € 5,092,325 € 5,092,325
Netherlands SOLMATES BV (998782035) NL817202821B01 participant PRC € 2,937,500 € 734,375 € 734,375
Germany CARL ZEISS SMT GMBH (950397174) DE811119999 participant PRC € 20,195,355 € 4,039,071 € 4,039,071
Germany INSTITUT FUER MIKROELEKTRONIK STUTTGART (999590433) DE147794161 participant REC € 3,017,725 € 1,056,203 € 1,056,203
Czechia FYZIKALNI USTAV AV CR V.V.I (999873867) CZ68378271 participant HES € 187,250 € 65,537 € 65,537
Israel NOVA LTD (956060228) IL511812463 participant PRC € 6,300,000 € 1,260,000 € 1,260,000
Czechia CRYTUR SPOL SRO (952502559) CZ25296558 participant PRC € 976,841 € 244,210 € 244,210
Israel MELLANOX TECHNOLOGIES LTD - MLNX (990560024) IL512763285 participant PRC € 6,500,000 € 1,300,000 € 1,300,000
Netherlands FEI ELECTRON OPTICS BV (985480037) NL801626857B01 participant PRC € 5,620,000 € 1,124,000 € 1,124,000
Germany OPTIX FAB GMBH (925881782) DE286502106 participant PRC € 687,500 € 171,875 € 171,875
Israel CARL ZEISS SMS LTD (898445720) IL512959495 participant PRC € 4,863,700 € 972,740 € 972,740
Belgium JSR MICRO NV (986308708) BE0429388316 participant PRC € 633,473 € 126,694 € 126,694
Austria PLANSEE SE (999488389) ATU32990305 participant PRC € 2,961,036 € 592,207 € 592,207
France CAMECA SAS (954830753) FR67403092216 participant PRC € 700,000 € 140,000 € 140,000
Germany ADVANCED MASK TECHNOLOGY CENTER GMBH & CO KG (953609038) DE223348968 participant PRC € 1,397,625 € 279,525 € 279,525
Israel KLA-TENCOR CORPORATION (ISRAEL) (999943707) nan participant PRC € 6,025,000 € 1,205,000 € 1,205,000