R3-PowerUP (737417)

  https://cordis.europa.eu/project/id/737417

  Horizon 2020 (2014-2020)

  300mm Pilot Line for Smart Power and Power Discretes

  ECSEL Key Applications and Essential Technologies (IA) (ECSEL-2016-2)

  nanotechnology  ·  productivity

  2017-11-01 Start Date (YY-MM-DD)

  2023-04-30 End Date (YY-MM-DD)

  € 180,318,047 Total Cost


  Description

R3-POWERUP will push through the new generation of 300mm Pilot Line Facility for Smart Power technology in Europe. This will enable the European industry to set the world reference of innovative and competitive solutions for critical societal challenges, like Energy saving and CO2 Reduction (ref. to COP21 Agreement ), as well as Sustainable Environment through electric mobility and industrial power efficiency. ● Development and demonstration of a brand new 300mm advanced manufacturing facility addressing a multi-KET Pilot Line (i.e. Nanoelectronics, Nanotechnology, Advanced Manufacturing) ● Improvement in productivity and competitiveness of integrated IC solutions for smart power and power discrete technologies. The strategy of the project is the following: ● The Pilot Line will enable the realization of sub-100nm Smart Power processes, starting from the 90nm BCD10 process, taking profit from the advanced and peculiar equipments available only for 300mm wafer size. ● The availability of a 300mm full processing line will also exploit the portability to 300mm of the most critical and expensive process steps devoted to power discrete devices. ● The Pilot Line will build on Digital Factory and Industry 4.0 principles, enforcing a flexible, adaptive and reliable facility, in order to investigate also the synergy and economic feasibility of supporting both Smart Power and power discrete processes in the same manufacturing line. ● The application of such technologies will be a breakthrough enabler for Energy Efficiency and CO2 Reduction worldwide, in line with COP21’s global action plan. The Pilot Line is based on three main pillars: 1. Market driven continuous innovation on smart-power and power discrete; 2. Industrial policy focused on high quality and mass production’s cost optimization; 3. Set the ground for future wafer upgrade of “More than Moore” disruptive technologies (e.g. advanced MEMS manufacturing, now at 200mm)


  Complicit Organisations

2 Israeli organisations participate in R3-PowerUP.

Country Organisation (ID) VAT Number Role Activity Type Total Cost EC Contribution Net EC Contribution
Slovakia SLOVENSKA TECHNICKA UNIVERZITA V BRATISLAVE (999868823) SK2020845255 participant HES € 280,000 € 98,000 € 98,000
Belgium ICOS VISION SYSTEMS NV (953141692) BE0431049588 participant PRC € 1,590,000 € 318,000 € 318,000
Poland SIEC BADAWCZA LUKASIEWICZ - INSTYTUT MIKROELEKTRONIKI I FOTONIKI (892247711) PL5213910680 participant REC € 399,000 € 139,650 € 139,650
Finland PICOSUN OY (999503812) FI11055816 participant PRC € 1,200,000 € 300,000 € 300,000
Slovakia NANO DESIGN SRO (953715932) SK2022343873 participant PRC € 170,000 € 42,500 € 42,500
Poland TRITEM SPOLKA Z OGRANICZONA ODPOWIEDZIALNOSCIA (938195544) PL8991094169 participant PRC € 200,000 € 50,000 € 50,000
Netherlands ADVANCED PACKAGING CENTER BV (955330400) NL821611203B01 participant PRC € 680,000 € 170,000 € 170,000
Germany ANCOSYS GMBH (918599992) DE813247381 participant PRC € 400,000 € 80,000 € 80,000
Germany ROBERT BOSCH GMBH (999908787) DE811128135 participant PRC € 2,970,430 € 594,086 € 594,086
Austria EV GROUP E. THALLNER GMBH (999611676) ATU64462824 participant PRC € 464,012 € 92,802 € 92,802
Netherlands ASM EUROPE BV (917363533) NL851112201B01 participant PRC € 264,750 € 52,950 € 52,950
Germany KLA-Tencor MIE GmbH (936919994) DE811141431 participant PRC € 1,381,250 € 276,250 € 276,250
Germany ATOTECH DEUTSCHLAND GMBH (999647275) nan participant PRC € 200,000 € 40,000 € 40,000
Germany SILTRONIC AG (990648003) DE177563163 participant PRC € 500,000 € 100,000 € 100,000
Italy UNIVERSITA DEGLI STUDI DI UDINE (999899281) IT01071600306 thirdParty HES € 220,000 € 0 € 77,000
Israel APPLIED MATERIALS ISRAEL LTD (985728454) IL511166373 participant PRC € 1,500,000 € 300,000 € 300,000
Czechia INSTITUT MIKROELEKTRONICKYCH APLIKACI SRO (999697424) CZ45277397 participant PRC € 298,125 € 74,531 € 74,531
France APPLIED MATERIALS FRANCE (936391538) FR32385124862 participant PRC € 119,556 € 23,911 € 23,911
France LAM RESEARCH SAS (936873240) FR71381687680 participant PRC € 350,000 € 70,000 € 70,000
Italy UNIVERSITA DEGLI STUDI DI PADOVA (999995602) IT00742430283 thirdParty HES € 220,000 € 0 € 77,000
Czechia VYSOKE UCENI TECHNICKE V BRNE (999873091) CZ00216305 participant HES € 300,000 € 105,000 € 105,000
Israel NOVA LTD (956060228) IL511812463 participant PRC € 500,000 € 100,000 € 100,000
Italy UNIVERSITA DI PISA (999862712) IT00286820501 participant HES € 350,000 € 122,500 € 122,500
Italy CONSIGLIO NAZIONALE DELLE RICERCHE (999979500) IT02118311006 participant REC € 350,000 € 122,500 € 122,500
Ireland APPLIED MATERIALS IRELAND LIMITED (918421415) IE6595578L participant PRC € 273,955 € 54,791 € 54,791
Germany AP&S INTERNATIONAL GMBH (918732009) DE814744180 participant PRC € 375,000 € 93,750 € 93,750
Italy UNIVERSITA DEGLI STUDI DI PAVIA (999893752) nan participant HES € 350,000 € 122,500 € 122,500
France SOITEC SA (990360010) FR57384711909 participant PRC € 499,977 € 99,995 € 99,995
Italy POLITECNICO DI TORINO (999977754) IT00518460019 participant HES € 350,000 € 122,500 € 122,500
Romania UNIVERSITEA NATIONALA DE STIINTA SITEHNOLOGIE POLITEHNICA BUCUREST (999842342) nan participant HES € 0 € 0 € 0
Italy POLITECNICO DI MILANO (999879881) IT04376620151 thirdParty HES € 220,000 € 0 € 77,000
Italy ALMA MATER STUDIORUM - UNIVERSITA DI BOLOGNA (999993953) IT01131710376 thirdParty HES € 439,999 € 0 € 153,999
Italy CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA (999659885) IT02598581201 participant REC € 1,100,000 € 385,000 € 0
Austria BESI AUSTRIA GMBH (991781836) ATU32447901 participant PRC € 1,200,000 € 240,000 € 240,000
Spain GREEN POWER TECHNOLOGIES SL (996512914) ESB91238154 participant PRC € 500,000 € 125,000 € 125,000
France LASER SYSTEMS & SOLUTIONS OF EUROPE (936781478) FR61802526574 participant PRC € 298,666 € 59,733 € 59,733
Italy STMICROELECTRONICS SRL (999977657) IT00951900968 coordinator PRC € 160,000,000 € 23,244,092 € 23,244,092
Germany DISCO HI-TEC EUROPE GMBH (950334415) DE131174016 participant PRC € 600,000 € 120,000 € 120,000
Spain UNIVERSIDAD DE SEVILLA (999862518) ESQ4118001I participant HES € 303,325 € 106,163 € 106,163